TY  - BOOK
AU  - Kaul, Anupama B.
TI  - Microelectronics to nanoelectronics: materials, devices and manufacturability 
SN  - 9781466509542;1466509546
AV  - T 174.7 .M498 2013
PY  - 2013///];ΓäùΓÖ¡2013
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Microelectronics
KW  - Nanoelectronics
KW  - Nanotechnology
N1  - Includes bibliographical references and index
N2  - This book gives a comprehensive cross-section of promising MEMS and nanotechnologies that are important to the future growth of the electronics industry. International experts in academia and leading industrial institutions present the most recent scientific developments. They highlight new technologies that have successfully transitioned from the laboratory to the marketplace as well as technologies that have near-term market applications in electronics, materials, and optics. The book also provides up-to-date references on the latest advances in this evolving field--
ER  -