| 000 | 01646nam a2200313Ia 4500 | ||
|---|---|---|---|
| 001 | 343712 | ||
| 003 | 0000000000 | ||
| 005 | 20211104091453.0 | ||
| 008 | 120517s2013 fluaf b 001 0 eng | ||
| 010 | _a2012016100 | ||
| 020 | _a9781466509542;1466509546 | ||
| 035 | _a(SKY)793689448 | ||
| 040 |
_aDLC _cDLC _erda |
||
| 050 |
_aT 174.7 _b.M498 2013 |
||
| 245 | 0 |
_aMicroelectronics to nanoelectronics : _bmaterials, devices and manufacturability / _ceditor, Anupama B. Kaul. |
|
| 264 |
_aBoca Raton, FL : _bCRC Press, _c[2013];ΓäùΓÖ¡2013 |
||
| 300 |
_axxiii, 407 pages, [32] pages of plates : _billustrations (some color) _c24 cm. |
||
| 336 |
_atext _2rdacontent |
||
| 337 |
_aunmediated _2rdamedia |
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| 338 |
_avolume _2rdacarrier |
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| 504 | _aIncludes bibliographical references and index | ||
| 520 | _aThis book gives a comprehensive cross-section of promising MEMS and nanotechnologies that are important to the future growth of the electronics industry. International experts in academia and leading industrial institutions present the most recent scientific developments. They highlight new technologies that have successfully transitioned from the laboratory to the marketplace as well as technologies that have near-term market applications in electronics, materials, and optics. The book also provides up-to-date references on the latest advances in this evolving field-- | ||
| 650 |
_aMicroelectronics. _973455 |
||
| 650 |
_aNanoelectronics. _9127333 |
||
| 650 |
_aNanotechnology. _920533 |
||
| 700 |
_aKaul, Anupama B. _9127334 |
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| 942 | _cCIR | ||
| 999 |
_c90979 _d90979 |
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