The science of engineering of microelectronic fabrication / Stephen A. Campbell.
Material type: TextSeries: The Oxford series in electrical and computer engineeringPublication details: New York : Oxford University Press, c2001.Edition: 2nd edDescription: xiv, 603 p. : ill. ; 24 cmISBN:- 0195136055
Item type | Current library | Call number | Status | Date due | Barcode | |
---|---|---|---|---|---|---|
Graduate Studies | DLSU-D GRADUATE STUDIES Graduate Studies | TK 7871.85 .C153 2001 (Browse shelf(Opens below)) | Available | 3AEA0000267972 |
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